Core Modules
During the course work in semester one and two the students have to complete 6 core modules and 2 laboratory modules. Each module has 45 contact hours. They will take place at facilities at NTU by Professors of TUM or NTU.
| Module Code | Module Name | Lecturers | Hours | Sem |
| NM6062 | Business and Technical English | Ms Aileen Ng Ms Chan Ling Ling |
80 | 1 |
| NM6606 | Integrated Circuit Manufacturing | Prof Walter Hansch | 45 | 1 |
| NM6604 | Lab 1 : Semiconductor Process & Device Simulation |
Prof Peonar Daniel Puiu
Prof Zhou Xing
|
45 | 1 |
| NM6605 | Lab 2: Design & Modeling of Nanodevices |
Prof Ang Lay Kee
Prof Fan Weijun
|
45 | 2 |
| NM6601 | Microfabrication Technology |
Prof Tse Man Siu
Asst Prof Yu Hong Yu
|
45 | 1 |
| NM6603 | Modern Semiconductor Device |
Prof Zhang Dao Hua
Prof Tang Ding Yuan
|
45 | 2 |
| NM6607 | Optomechatronic Measurement Systems | Prof Dr.-Ing habil Dr. h.c. Alexander W. Koch | 45 | 1 |
| NM6608 | Physical Electronics | Prof Gerhard Wachutka | 45 | 2 |
| NM6602 | Quality & Reliability Engineering | Prof Ang Diing Shenp Prof Tan Cher Ming |
45 | 2 |
Elective Modules
| Module Code | Module name | Lecturers | Hours | Sem |
| NM6617 | Advanced MOSFET & Novel Devices (TUM) | Prof Walter Hansch | 45 | 1 |
| NM6611 | Failure Mechanisms & Device Characterization (NTU) | Prof Wong Kin Shun Terence | 45 | 2 |
| NM6610 | IC Integrated Circuit) Packaging (NTU) | Prof Tan Cher Ming Asst Prof Tan Chuan Seng |
45 | 2 |
| NM6616 | Nano-Electronics (TUM) | Prof Dr. Paolo Lugli | 45 | 2 |
| NM6613 | ULSI Technology (NTU) | Prof Wang Hong | 45 | 1 |
No registration is required.
Electives will be completed in two weeks each. The exam will be at the end of each elective.
Cross-discipline Modules
| Module Code | Module Name | Lecturers | Hours | Sem |
| CD5030 | Aspects of Asian & European Relations Today | Dr Reuben Wong | 10 | TBA |
| CD5031 | Cultural, Social and Economic Aspects of Globalization | Dr Reuben Wong | 10 | TBA |
| CD5131 | International Intellectual Property Law | TBA | 10 | TBA |
| CD5170 | Selected Topics in Business Administration | Asst Prof Teo Gin Swee | 10 | TBA |
| CD5180 | Selected Topics in Business Management | Dr Charles Chow | 10 | TBA |
For graduation, a student must obtain a minimum cumulative average points of 2.5 (equivalent to average grade of C+) of all the technical modules, pass enrichment subject, all cross discipline modules and MSc thesis report as well as completion of internship with the submission of report.
Core Modules
NM6062 Business and Technical English
The course focuses on the skills needed to communicate research effectively and confidently in a variety of situations. Particularly, the focus is on technical writing, oral presentations and the interpersonal and intercultural communication skills required. Students will learn and develop effective strategies for writing and presenting their research findings in academic and professional situations. The course is also designed to enhance English communication competence in these settings.
NM6606 Integrated Circuit Manufacturing
Probability calculations in manufacturing. Overview on chip fabrication processes, special features in a wafer fab. Wafer fabrication line by equations. Overall equipment and factory efficiency. Quality management with design of manufacturability. Machine capability investigations. Design of experiments. Statistical process control.
NM6604 Laboratory 1: Semiconductor Process and Device Simulation
Process models: diffusion, oxidation, implantation. Process variables/targets: doping profiles, junction depths, oxide thickness. Process simulation: Simulate a given sub-micron CMOS process recipe and study profiles and layer structures. Physical models. Numerical algorithms and solutions. Device performance parameters. Short-channel effects. DC simulations. Device simulation: Simulate the DC characteristics of the “fabricated” device and analyze device operation with respect to potential, field, and carrier distributions as well as terminal I–V characteristics. Wafer-split experiment. Device-target vs. process-variable relations. Transistor performance optimization/trade-offs through process variation. Technology development and optimization. Design of Experiment (DOE): Implement a computer experiment to study the scaling characteristics (varying gate length) of the given sub-micron technology. Study the influence of process variations on device performance parameters.
NM6605 Laboratory 2: Design and Modelling of Nanodevices (NTU)
Quantum blockade, quantum Ohm law, quantum conductance, quantum capacitance, quantum confinement, coherent transport, and transmission. Nanowire, transistors, influence of interface properties, low current to high current regime, scattering to ballistic regimes, noise spectrum. Quantum well. Energy subbands and wave functions. k.p methods. Band structure calculation by using single band and 6-band k.p methods. Density of state, doping concentration, and Fermi energy level calculations by using single band and 6-band k.p methods. Intersubband(intraband) transition. Squared transition element calculation. Absorption spectrum. Cut-off wavelength of photodetector. Influence of Ge composition and well width on peak wavelength of photodetectors. Transition energy. Emission wavelength. Doping concentration. Fermi level. Organic devices (Organic thin film transistors, OLED, organic solar cells). Molecular diodes and switches. Carbon Nanotubes.
NM6601 Microfabrication Technology
Advanced gate oxide formation. Thin film deposition. Lithography and resist. Technology etching process and technology process. Integration metrology and analytical techniques. Kow-k dielectrics. Chemical and mechanical polishing (CMP) cleaning technology.
NM6603 Modern Semiconductor Devices
Bipolar transistor operation pinciples. Bipolar device modeling. State-of-the-art bipolar structures. CMOS device scaling effects. Semiconductor memories. Future trends and challenges.
NM6607 Optomechatronic Measurement Systems
Interaction of microelectronics, micromechanics and microotics. Properties of light. Laser-based measurement systems. Optical interferometry. Wafer surface analysis. Shape and deformation measurement. Stress measurement. Stress sensors. Optical waveguides. Application-oriented measurement devices.
Basic energy-domain coupling effects in solid-state microstructured electronic and micromechatronical devices and their application fields. Characteristic properties of semiconductor materials. Solid-state devices under nearequilibrium peration conditions.
NM6602 Quality and Reliability Engineering
Quality management and planning. Statistical process control. Design of experiments. Basic reliability statistics. Application of reliability statistics.
Elective Modules
NM6617 Advanced MOSEFT & Novel Devices
Historical development of mainstream MOSFETs until today: economical, technological and physical fundamentals. Properties of long channel and short channel MOSFETs. Hot carrier effects, scaling rules, basic of charge carrier transport (quantum-mechanical, hydro-dynamics, ballistics). Proposed new MOSFET structures (vertical MOSFETs, double-gate, fully-depleted MOSFETs). Hot-electron transistors, tunnelling transistors, low-dimensional devices, single-electron transistor, single-electron memories, quantum-electronics.
NM6611 Failure Mechnaisms and Device Characterization
Introduction to Failure Mechanisms. Bulk failure mechanism of semiconductor devices. Dielectric failure mechanisms of semiconductor devices. Metallization failure mechanisms of semiconductor devices. Interface failure mechanisms of semiconductor devices. Reliability testing.
NM6610 IC (Integrated Circuit) Packaging
IC Packaging Overview. Electrical Packaging Design and Thermal Management. Single Chip and Multichip Packaging. IC Assembly, Sealing and Encapsulation. IC Packaging Failure and Reliability. Microsystems Packaging and Applications.
Low dimensional structures: quantum wells, quantum wires and quantum dots. Electronic, optical, transport porperties of nanostructures. Quantum semiconductor devices. Fabrication and characterization techniques of nanotechnology. Applications of nanostructures, nanodevices and nanosytems. The bottom-up approach to nanotechnology: introduction to molecular electronics and optoelectronics. Organic materials for electronics: self-assembled monolayers; conducting polymers; carbon nanotubes. Circuit implementations and architectures for nanostructures: quantum cellular automata and cellular non linear networks. Introduction to quantum computing.
Advanced MOS structures and process technology. Advanced bipolar transistors and process technology. Advanced bipolar transistors and process technology. MOS scaling rules and small geometry effects. CMOS latch up. Isolation and dielectrics.
Cross-Discipline Modules
CD5030 Aspects of Asian & European Relations Today
Understanding intercultural aspects, government structures and differences in European and Asian religions in business and private environment. Basic comparison in European and Asian modern history.
CD5031 Cultural, Social and Economic Aspects of Globalization
To familiarize students with the basic principles on international economics and the problems and issues of the world economy as well as the terms used such as liberalism, mercantilism, free trade, protectionism. Topics on contemporary debate related to globalization, concepts, theories, goals, and the main actors and the various opponents of a global economy, e.g. nongovernmental organizations, antiglobalization movement, lobbyists, nationalist movements are covered. Students will also examine the social and cultural impact of globalization, especially the transformation of local societies throughout the world. Topics are like the spread of religions across cultural borders, the replacement of local culture by popular culture, the impact of science and technology transfer, or the growing ethnic diaspora community worldwide etc.
CD5131 International Intellectual Property Law
This module will give a brief introduction to intellectual property rights, and focus on insights into general principles of patent law and international conventions governing the patent law. Current developments and criticism of the current patent law system will also be addressed. In addition practical (legal) aspects of the commercialization of patents will be dealt with.
CD5170 Selected Topics in Business Administration
In this seminar, the fundamentals and basics of business administration are discussed in various examples from companies in Asia and Europe. Starting with the fundamental business theories, we soon come to the hard facts – how to run a company in a competitive environment. What factors make a company successful? How does a company become a global player and what risks exist in the market? How do companies deal with competitors and how do they find out what the marked, i.e. their customers, demand? “Strategic management” is the key to answer these questions as well as “Strategic competitiveness”. We will further discuss the fundamentals in M & A (mergers & acquisitions) – how to estimate the value of a company and a global brand (branding). Diversification contra specialization – several case studies will point up the different management theories.
CD5180 Selected Topics in Business Management
This is an interdisciplinary approach to leadership and management with insights into Sun Tze’s “Art of War” and The Bhagavad Gita, linking Confucian ethics with Buddhist economics, with highlights of idiosyncrasies in doing business in Asia like Feng Shui, hampers and Guanxi. Key aspects of doing business in ASEAN, China and India will also be discussed.